The EUV chipmaking system by ASML represents a fascinating new technology breakthrough - one that will likely enable Moore's Law trend to continue for many more years.
Below is a video of an EUV chipmaking installation at Intel. The $150 million machine that is the heart of the installation is made by ASML Holding - the only firm that currently makes and sells EUV systems for chipmaking.
from https://en.wikipedia.org/wiki/Extreme_ultraviolet_lithography:
Extreme ultraviolet lithography (also known as EUV or EUVL) is an optical lithography technology using a range of extreme ultraviolet (EUV) wavelengths, roughly spanning a 2% FWHM bandwidth about 13.5 nm, to produce a pattern by exposing reflective photomask to UV light which gets reflected onto a substrate covered by photoresist. It is widely applied in semiconductor device fabrication process.
As of 2022, ASML Holding is the only company who produces and sells EUV systems for chip production, mainly targeting 5 nm. At the 2019 International Electron Devices Meeting (IEDM), TSMC reported use of EUV for 5 nm in contact, via, metal line, and cut layers, where the cuts can be applied to fins, gates or metal lines.[1][2] At IEDM 2020, TSMC reported their 5 nm minimum metal pitch to be reduced 30% from that of 7 nm,[3] which was 40 nm.[4] Samsung's 5 nm is lithographically the same design rule as 7 nm, with a minimum metal pitch of 36 nm.[5]
The video from https://www.youtube.com/watch?v=Jv40Viz-KTc:
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